학술논문
Wafer-scale thin-film lithium niobate device fabrication and characterization
Document Type
Conference
Author
Source
TENCON 2022 - 2022 IEEE Region 10 Conference (TENCON) Region 10 Conference (TENCON), TENCON 2022 - 2022 IEEE. :1-2 Nov, 2022
Subject
Language
ISSN
2159-3450
Abstract
Lithium niobate is an excellent optical material and is of great significance for future photonic integrated circuits. This work studies the wafer-scale fabrication of thin-film lithium niobate devices and demonstrates a robust process flow to realize photonic elements with optical loss of − 0.1 dB/cm.