학술논문
CMOS Latch-up Improvement: Embedded Active Collector in FinFET Technology
Document Type
Conference
Source
2022 44th Annual EOS/ESD Symposium (EOS/ESD) EOS/ESD Symposium (EOS/ESD), 2022 44th Annual. EOS-44:1-6 Sep, 2022
Subject
Language
Abstract
An embedded active collector is proposed for CMOS latch-up improvement. The implemented structures in FinFET technology are investigated through derived analytical model, TCAD simulation, and experiments. Active collector design shows a significant latch-up improvement by enhanced holding voltage and suppressed SCR turn-on. The high holding voltage sensitivity on anode-cathode spacing and active collector area offers excellent design capability for latch-up free CMOS.