학술논문
Low-Capacitance SCR for On-Chip ESD Protection with High CDM Tolerance in 7nm Bulk FinFET Technology
Document Type
Conference
Author
Source
2019 41st Annual EOS/ESD Symposium (EOS/ESD) Symposium (EOS/ESD), 2019 41st Annual EOS/ESD. EOS-41:1-5 Sep, 2019
Subject
Language
Abstract
A low-capacitance silicon-controlled rectifier for high speed I/O pad protection is implemented with TSMC 7nm bulk FinFET technology. It can achieve much higher ESD robustness per capacitance with better dynamic on-resistance and faster turn-on speed for CDM protection as compared to the prior art.