학술논문
A 22nm high performance embedded DRAM SoC technology featuring tri-gate transistors and MIMCAP COB
Document Type
Conference
Author
Brain, R.; Baran, A.; Bisnik, N.; Chen, H.-P.; Choi, S.-J.; Chugh, A.; Fradkin, M.; Glassman, T.; Hamzaoglu, F.; Hoggan, E.; Jahan, R.; Jamil, M.; Jan, C.-H.; Jopling, J.; Kan, H.; Kasim, R.; Kirby, S.; Lahiri, S.; Lee, B.-C.; Lenski, D.; Limb, J.; Lindert, N.; Musorrafiti, M.; Neulinger, J.; Rockford, L.; Park, J.; Singh, K.; Staus, C.; Steigerwald, J.; Turkot, B.; Vandervoorn, P.; Venkatesan, R.; Wu, S.; Yeh, J.-Y.; Wang, Y.; Zhang, Z.; Zhang, K.
Source
2013 Symposium on VLSI Technology VLSI Technology (VLSIT), 2013 Symposium on. :T16-T17 Jun, 2013
Subject
Language
ISSN
0743-1562
2158-9682
2158-9682
Abstract
A 22 nm generation technology is described incorporating transistor and interconnects with performance suitable for the needs of both high density DRAM and high-performance logic devices. We have integrated a 0.029 µm 2 DRAM cell capable of meeting >100µs retention at 95°C. Results will be reported for a test-vehicle with best-reported array density at 17.5Mb/mm 2 based on a 128Mb macro. The process technology utilizes our leading edge 22nm 3-D tri-gate transistor as described previously [1,2]. The excellent leakage and performance characteristics of tri-gate transistors have been optimized for the access transistor, while maintaining the performance needed to enable high performance circuits in the same die. A high aspect-ratio, 3-D metal-insulator-metal capacitor trench has been integrated into the ultra-low-k interlayer dielectric and Cu metallization used for interconnect stacks. The previously described 22nm logic and SoC technology has been leveraged, with a 3-D MIM capacitor included in the ultra-low-k (ULK) ILD at the same level as the Metal-2 through Metal-4 interconnects. Excellent retention capability and yield have been demonstrated.