학술논문
Environmental Impact of CMOS Logic Technologies
Document Type
Conference
Author
Source
2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2022 6th IEEE. :82-84 Mar, 2022
Subject
Language
Abstract
Sustainability is becoming a key component of business and regulations due to concerns on climate change, resource depletion and pollution. The IC manufacturing is resource intensive and due to the increase in complexity from node to node we find the number of process steps increase by 2.6x and the resulting associated energy need by 3.5x when scaling from iN28 to iN3. Simultaneously the greenhouse gas emissions and water usage are increasing accordingly. Prompt actions are needed from the industry to mitigate these effects.