학술논문
Bragg Reflector Co-integrated with SiN and a-Si on 300 mm Wafers for Low Loss Optical Beamformers
Document Type
Conference
Author
Source
2022 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2022 Conference on. :1-2 May, 2022
Subject
Language
Abstract
We demonstrate a build-up consisting of SiN and a-Si photonics with a Bragg reflector, targeted at optical beamforming applications. We developed CMOS-compatible low-loss PVD SiN waveguides and grating couplers with enhanced efficiency.