부산대학교 도서관

In order to enhance the detection capabilities of large-area detectors operating at room temperature, particularly in terms of response time and sensitivity parameters, we have developed an innovative terahertz detector featuring bowtie arrays based on projection microstereolithography ( $\text{P}\mu $ SL). This device integrates the localized surface plasma (LSP) effect of nonmicrocavities with the exceptional properties of Weyl semimetal materials within its subwavelength structure. To further investigate the detection performance and improve the response time, we have employed a laser field to enhance the surface carrier mobility of the device, thereby enhancing its detection capabilities. At room temperature, the terahertz sensitivity for 0.1 THz has been enhanced from 0.30 to 0.54 MV/W, representing an 80% improvement, while the noise equivalent power (NEP) has been reduced from 92 to 50 pW/Hz1/2, marking 45.6% improvement. The response time of the device under external field stimulation is 50 ms. Given the ease and high reproducibility of the ultrahigh-resolution 3-D printing for fabricating microstructures and the straightforward crystallization of WTe2 magnetron-sputtered thin films, our proposed high-performance terahertz wave photodetector scheme holds promise for effective terahertz wave detection, with potential applications in the realms of 6G communication and terahertz radar.