학술논문
Anomalous short-channel effects in 0.1 μm MOSFETs
Document Type
Conference
Author
Source
International Electron Devices Meeting. Technical Digest Electron devices Electron Devices Meeting, 1996. IEDM '96., International. :571-574 1996
Subject
Language
ISSN
0163-1918
Abstract
A systematic study of the impact of junction dose on N- and P-channel MOSFETs with 0.10 /spl mu/m effective channel lengths operating at 1.8V is reported. A non-monotonic dependence of saturated V/sub t/ roll-off on junction dose is observed with a minimum occurring for junction doses in the mid-10/sup 14/ cm/sup -2/ range. The degradation occurring at lower doses is caused by the lateral grading of the junctions as determined by the bias dependence of the overlap capacitance while that at higher doses is caused by deeper junctions.