학술논문
Wafer scale integration of $\mathbf{MX}_{2}$ based NMOS only ring oscillators on 300 mm wafers
Document Type
Conference
Source
2022 IEEE Silicon Nanoelectronics Workshop (SNW) Silicon Nanoelectronics Workshop (SNW), 2022 IEEE. :1-2 Jun, 2022
Subject
Language
ISSN
2161-4644
Abstract
A functional top gated CVD $\text{WS}_{2}$ based NMOS only 19 stage ring oscillators, integrated on a 300 mm wafer and fully processed in a 300 mm pilot line is demonstrated. The implementation of a back gated version would allow further improvement of the circuit.