학술논문
Miniaturized Ruthenium Oxide Cryogenic Temperature Sensor Based on MEMS Technology
Document Type
Conference
Source
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :991-994 Jan, 2024
Subject
Language
ISSN
2160-1968
Abstract
This paper reports a miniaturized temperature sensor based on ruthenium oxide with low resistance and high sensitivity at cryogenics. The ruthenium oxide thin films were prepared by screen-printing while electrodes were prepared using sputtering and lift-off processes. The size of the bare die is 1.0 mm × 0.8 mm and the packaged device size is 3.0 mm × 2.0 mm utilizing vacuum ceramic packaging technology. Compared with other cryogenic thermometers, this sensor performs a low resistance of 6400 Ω even when the temperature is down to 2 K. While, the temperature sensitivity and temperature coefficient of resistance (TCR) can achieve very high value of -870 Ω/K and -13.5% respectively.