학술논문
A High Resolution Differential Mode-Localized MEMS Accelerometer
Document Type
Periodical
Author
Source
Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 28(5):782-789 Oct, 2019
Subject
Language
ISSN
1057-7157
1941-0158
1941-0158
Abstract
A novel differential configuration of a high-resolution mode-localized resonant SOI-MEMS accelerometer is presented in this paper. An effective maximum scale factor of 11/g and a bias-stability of $2.96\mu g$ is demonstrated. A minimum noise floor of $3\mu g/\sqrt {Hz}$ is shown for device operation in an optimum working region. A large bandwidth of 350Hz is reported and methods to electronically tune the working bandwidth are described. These results benchmark mode-localized accelerometers favourably with respect to other high-end low-g commercial MEMS accelerometers.