학술논문

Silicon on insulator photonic integrated sensors: On-chip sensing and interrogation

Document Type

Conference

Author

Pozo, J.; Westerveld, W.; Harmsma, P.J.; Yang, S.; Bodis, P.; Nieuwland, R.; Lagioia, M.; Lo Cascio, D.M.R.; Staats, J.-P.; Schmits, R.; Berg, H. v.d.; Tabak, E.; Green, K.; Urbach, H.P.; Cheng, L.K.; Yousefi, M.

Source

2011 13th International Conference on Transparent Optical Networks Transparent Optical Networks (ICTON), 2011 13th International Conference on. :1-4 Jun, 2011

Subject

Photonics and Electrooptics
Power, Energy and Industry Applications
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Optical ring resonators
Strain
Photonics
Optical waveguides
Optoelectronic and photonic sensors
Optical sensors
silicon-on-insulator
photonic sensing
SOI
on chip interrogation
ring resonators
pressure sensor
strain sensor
ultrasound sensor
harsh environments
3×3 interferometer

Language

ISSN

2161-2056
2162-7339
2161-2064

Abstract

In this paper, we present two examples of photonic sensors based on ring resonators in Silicon-on-Insulator (SOI) waveguide technology as mass production compatible sensing units for the measurement of: strain, and ultrasound. Furthermore, the sensing units are characterized in extreme conditions to validate their robustness in harsh industrial environments. In addition, the monitoring of these sensing units is presented as an application of an on-chip 3×3 interferometer.

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