학술논문
Proposal and Evaluation of Dissolved Oxygen Image Sensor Using Iridium Oxide as Sensing Membrane
Document Type
Conference
Author
Source
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1133-1136 Jun, 2023
Subject
Language
ISSN
2167-0021
Abstract
In this study, an iridium oxide (IrO x ) film was deposited on a potentiometric array sensor with a pixel pitch of 23.55 μm, and an imaging device that can visualize dissolved oxygen (DO) in two dimensions was successfully fabricated for the first time. The output of the sensor showed a linear response in the DO concentration range of approximately 8 ppm to 30 ppm, with a response sensitivity of 27 mV/log[O 2 ]ppm. The response was reversible when the DO concentration was increased and decreased, confirming that the IrO x thin film functions as a DO-detection-sensitive membrane. We found the possibility of real-time visualization of oxygen consumption in small areas, such as blood and cells. In this study, the redox response of the IrO x film was linked to changes in DO concentration, and the response mechanism of the sensor was discussed.