학술논문
Robust digital control of nonlinear microelectro-mechanical actuators using sliding-mode control
Document Type
Conference
Author
Source
Conference Record of the Thirty-Eighth Asilomar Conference on Signals, Systems and Computers, 2004. Signals, Systems and Computers Signals, Systems and Computers, 2004. Conference Record of the Thirty-Eighth Asilomar Conference on. 1:34-38 Vol.1 2004
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Language
Abstract
This paper presents an overview of high precision robust digital control of MEMS nonlinear actuators, in particular torsional electrostatic actuators, using sliding-mode control [N. Yazdi et al. (2003), H. Sane et al. (2004)]. Sliding-mode control enables compact realization of a robust controller tolerant of device characteristic variations, nonlinearities and many types of inherent instabilities. Application of 1/sup st/ order SMC to the control of dual-axis torsional actuators beyond their pull-in limit is demonstrated. Also a modified SMC scheme which uses adaptive switching of the sliding-mode variable differential gain to improve control precision is presented. The modified scheme has resulted in average reduction of 44-56% in output chatter and 70-91% when used for control of several 2-axis gimbaled beam steering micromirrors with a wide range of mechanical characteristics.