학술논문
Robust sliding-mode control of electrostatic torsional micromirrors beyond the pull-in limit
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Conference
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Source
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Solid-state sensors, actuators and microsystems TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. 2:1450-1453 vol.2 2003
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Abstract
This paper presents high-resolution control of torsional electrostatic micromirrors beyond their inherent pull-in instability using robust sliding-mode control (SMC). SMC enables compact realization of a robust controller tolerant of device characteristic variations, non-linearities, and many types of inherent instabilities. Robustness of the control loop is demonstrated through extensive simulations and measurements on MEMS with a wide range in their characteristics. Control of two-axis gimbaled micromirrors beyond their pull-in instability with overall 14 milli-degrees pointing accuracy is confirmed experimentally.