부산대학교 도서관

This paper presents the design procedure, fabrication process, and experimental results of a high-sensitivity 100 N force sensor used as a weighing load cell. It incorporates MEMS semiconductor strain gauges that are bonded to a buckling lamella. A stainless steel single-point test body bears the force load, and its deflection causes the lamella to buckle. Due to the higher gauge factor of the silicon strain gauges, this sensor has a rated output four times higher than commercial load cells equipped with metallic strain gauges. This increased sensitivity enables the detection of force variations as low as 0.01% of the rated output.