학술논문
Laser power monitoring using MEMS micromirror technology
Document Type
Conference
Source
1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual (Cat. No.99CH36296) Reliability physics Reliability Physics Symposium Proceedings, 1999. 37th Annual. 1999 IEEE International. :198-201 1999
Subject
Language
Abstract
We have fabricated and characterized fiberized MEMS in situ power monitor chips in which a surface-micromachined out-of-plane micromirror partially reflects the incident multimode light to an on-chip fiber tap. Reflectivity and transmittivity were measured as a function of time at various increasing incident optical power levels, and for various material systems. The first prototypes show stability to hundreds of milliwatts.