학술논문
Vanadium oxide by radio frequency magnetron sputtering and spray pyrolysis technique: structural and optical properties
Document Type
Conference
Author
Source
2022 International Semiconductor Conference (CAS) Semiconductor Conference (CAS), 2022 International. :55-58 Oct, 2022
Subject
Language
ISSN
2377-0678
Abstract
Herein, structural and optical properties in vanadium oxide layers were evaluated by means of different spectroscopic tools, such as X-ray diffraction (XRD), X-ray reflectivity (XRR), X-ray photoelectron spectroscopy (XPS), diffuse reflectance spectroscopy (DRS) absorbance or photoluminescence (PL). The relationship between crystal structure and optical properties was carefully evaluated in vanadium oxide layers obtained by SPT and RF-MS at different synthesis parameters. A different bandgap for the samples obtained by RF-MS was attributed to the V 4 + oxidation states.