학술논문
Design of scanning capacitance microscope
Document Type
Conference
Source
2006 68th ARFTG Conference: Microwave Measurement ARFTG Conference, 2006 68th. :1-4 Nov, 2006
Subject
Language
Abstract
The design and manufacture of a scanning capacitance microscope (SCM) which is compatible with an atomic force microscope (AFM) for imaging of embedded nanostructure is discussed. The goals of the design are to use commercially available conductive AFM tips, and to incorporate it into an existing AFM system developed system.