학술논문
MOCVD grown solar-blind photodetector arrays
Document Type
Conference
Author
Source
Conference on Lasers and Electro-Optics, 2003. CLEO '03. Lasers and electro-optics Lasers and Electro-Optics, 2003. CLEO '03. Conference on. :2 pp. 2003
Subject
Language
Abstract
We report on the growth and fabrication of back-illuminated solar-blind photodetector array based on the AlGaN material system using low-pressure metalorganic chemical vapor deposition. Discrete photodetector devices exhibited a high external quantum efficiency of 58% and 256/spl times/256 photodetector arrays exhibited a high operability of >99%.