학술논문

High performance 3.3 and 5 volt 0.5-/spl mu/m CMOS technologies for ASICs
Document Type
Conference
Source
Proceedings of IEEE Custom Integrated Circuits Conference - CICC '94 Custom integrated circuits Custom Integrated Circuits Conference, 1994., Proceedings of the IEEE 1994. :11-14 1994
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
CMOS technology
Application specific integrated circuits
Etching
Threshold voltage
MOS devices
MOSFETs
Dielectrics
Tin
Implants
Resists
Language
Abstract
Two manufacturable high performance 0.5 pm CMOS technologies, one optimized for 5 V operation and the second optimized for 3.3 V operation, are presented. An improvement of 2 in circuit performance, 3.4 in packing density, 1.5 and 3.2 (for 5 and 3.3 V) in power consumption at constant speed, and 1.45 (for 3.3 V) in power consumption at maximum speed is achieved over AT&T's previous generation 0.9 /spl mu/m CMOS technology by device scaling, and aggressive interconnect and isolation design rules.ETX