학술논문

Sub-Micron Monolithic Full-Color Nanorod LEDs on A Single Substrate
Document Type
Periodical
Source
IEEE Photonics Journal IEEE Photonics J. Photonics Journal, IEEE. 15(1):1-5 Feb, 2023
Subject
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Light emitting diodes
Nanostructures
Substrates
Reflectivity
Periodic structures
Optical reflection
Stimulated emission
FDTD
InGaN
LED
light reflector
nanorod
Language
ISSN
1943-0655
1943-0647
Abstract
The extended reality (XR) display, including augmented reality (AR) and virtual reality (VR), requires ultrahigh-resolution and high-luminance pixel technology. GaN-based micro-LEDs are the most promising for high-density pixel applications. However, it is necessary to simultaneously fabricate full-color R/G/B emitters on a single substrate. Moreover, the efficiency droop at long wavelengths with high-indium InGaN still remains a challenge. The InGaN nanorod has the potential to realize monolithic R/G/B LEDs on a single substrate, and the Al reflector has a light reflectance that can dramatically improve light extraction efficiency. Here, we designed sub-micron monolithic full-color R/G/B nanorod LEDs with an Al core-shell reflector on single chip. The optimal structures for light confinement and vertical light extraction by single InGaN nanorod R/G/B LED structures were identified. The single nanorod with Al core-shell structure dramatically increased the light extraction efficiency, and showed an improvement of more than 20%, especially in the red wavelength. As a result, by introducing a long-length nanorod structure, we have successfully designed a new submicron pixel with full-color R/G/B LEDs operating within 1 μm × 1 μm size. This unique design will be a key factor in enabling the next generation of AR and VR displays that require ultra-small and compact pixels.