학술논문

Yield Methodology and Learning in Phase Change Memory (PCM) technology for Analog Computing : Topic/category: YE: Yield Enhancement/Learning, YM: Yield Methodologies
Document Type
Conference
Source
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2022 33rd Annual. :1-4 May, 2022
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Phase change materials
Resistance
Semiconductor device manufacture
Phase change memory
Hardware
Monitoring
Testing
Language
ISSN
2376-6697
Abstract
We discuss inline electrical testing to monitor the baseline of Analog Computing hardware using Phase Change Memory (PCM) technology. Tightening the PCM resistance distribution is necessary to meet analog computation requirement. A new yield methodology is introduced.