학술논문
Process Challenge in Analog Computing Hardware using Phase Change Memory (PCM)
Document Type
Conference
Author
Source
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2023 34th Annual. :1-4 May, 2023
Subject
Language
ISSN
2376-6697
Abstract
We discuss the process challenges such as the heater geometry effect, heater patterning processes and deep via formation. Based on the electrical data, we improve the processes and Phase Change memory (PCM) resistance distribution to meet Analog Computing requirement.