학술논문
AC Performance of Polysilicon Leaky-Mode MSM Photodetectors
Document Type
Periodical
Author
Source
Journal of Lightwave Technology J. Lightwave Technol. Lightwave Technology, Journal of. 28(18):2724-2729 Sep, 2010
Subject
Language
ISSN
0733-8724
1558-2213
1558-2213
Abstract
Pulse response of polysilicon metal-semiconductor-metal (MSM) photodetectors fabricated in a standard CMOS processes is described, including demonstration of pulse full-width at half-max (FWHM) of 1.32 ns. Pulse FWHM as low as 0.81 ns has been measured, as have 10%–90% rise times of 0.39 ns. Measured detector performance is limited by laser diode modulation capabilities. An analytic expression for the time domain response in the presence of body and contact recombination is reported.