학술논문
Optical characterization of a leaky-mode polysilicon photodetector using near-field scaning optical microscopy
Document Type
Conference
Author
Source
2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on. :1-2 May, 2006
Subject
Language
ISSN
2160-9004
Abstract
Near-field scanning optical microscopy was used to characterize the light absorption capability of a leaky-mode coupled polysilicon photodetector fabricated for CMOS on-chip optical interconnects. The observed results are in good agreement with modal calculations.