학술논문
Coherent diffraction imaging of buried nanostructures in a reflection geometry with extreme ultraviolet light
Document Type
Conference
Author
Source
2016 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2016 Conference on. :1-2 Jun, 2016
Subject
Language
Abstract
We use reflection-mode ptychography CDI with HHG illumination to image copper nanostructures buried beneath 100nm of aluminum. Our technique yields absolute reflectivity images, allowing non-destructive detection of diffusion at the Al-Cu boundary, confirmed by Auger-Electron-Spectroscopy.