부산대학교 도서관

Production cycle times (throughput rates) are a primary aspect of semiconductor manufacturing efficiency. The cycle time's dependence on the logistics of manufacturing is overwhelming. Process variability excludes “just in time” WIP delivery. And not able to deal with the inherent variability of fabrication processes, the manufacturing logistics compensates by stuffing the fab full of waiting WIP. The results are long cycle times and retarded throughput. Research indicates improvements in cycle times through the importing of hybrid logistics infrastructures into existing material handling systems. The method is demonstrated, via dynamic high-resolution simulation, by comparing full 300 mm fabs having standard or hybrid logistics. Cycle time and throughput gains are realized via the import of hybrid infrastructures.