학술논문
Probing the Plasma Sheath by the Continuous Mass Loss of Microparticles
Document Type
Periodical
Author
Source
IEEE Transactions on Plasma Science IEEE Trans. Plasma Sci. Plasma Science, IEEE Transactions on. 41(4):764-768 Apr, 2013
Subject
Language
ISSN
0093-3813
1939-9375
1939-9375
Abstract
A novel approach of using microparticles as probes for the sheath structure of radio-frequency discharges is presented. Starting with a heavy (large) particle confined deep in the plasma sheath, the ambient plasma causes a continuous mass loss, which increases the levitation height of the particle. It is shown that this process can be precisely monitored with the phase-resolved resonance method, which allows probing the force balance of the particle with high spatial resolution. The resulting force profile is in reasonable agreement with recent sheath models.