학술논문

Multifrequency Nanomechanical Mass Spectrometer Prototype for Measuring Viral Particles Using Optomechanical Disk Resonators
Document Type
Conference
Source
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :153-156 Jan, 2023
Subject
Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Nanoparticles
Bacteriophages
Gold
Visualization
Atmospheric measurements
Prototypes
Measurement by laser beam
Nanomechanical mass spectrometry
optomechanical disk resonators
microcantilevers
mass sensing
Language
ISSN
2160-1968
Abstract
Nanomechanical mass spectrometry allows characterization of analytes with broad mass range, from small proteins to bacterial cells, and with unprecedented mass sensitivity. In this work, we show a novel multifrequency nanomechanical mass spectrometer prototype designed for focusing, guiding and soft-landing of nanoparticles and viral particles on a nanomechanical resonator surface placed in vacuum. The system is compatible with optomechanical disk resonators, with an integrated optomechanical transduction method, and with the laser beam deflection technique for the measurement of the vibrations of microcantilever resonators. The prototype allows the in-vacuum alignment of resonators thanks to a dedicated visualization system. Finally, in this work, we have demonstrated the detection of gold nanoparticles, polystyrene nanoparticles and phage G viruses with optomechanical disks and microcantilever resonators.