학술논문
Blue Femtosecond Laser-Induced Crystallization of Amorphous Silicon
Document Type
Conference
Source
2020 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2020 Conference on. :1-2 May, 2020
Subject
Language
Abstract
Amorphous silicon was crystallized using a blue ultrafast Ti:Sapphire laser system. Polysilicon with average grain size of 280 nm was achieved with fluence 30 of mJ/cm 2 and overlapping of 93.75% at room temperature.