학술논문
Integrated optomechanical sensing for semiconductor metrology
Document Type
Conference
Author
Source
2021 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2021 Conference on. :1-2 May, 2021
Subject
Language
Abstract
In this talk we will present recent process on the integration of nano-opto-electro-mechanical sensors with photonic circuits and optical read-out, showing a route towards fully-integrated optical sensing.