부산대학교 도서관

We report the fabrication and characterization of two kinds of titanium membranes made of bulk titanium. Both membrane designs are compared mechanically to define the most suited for the targeted application. These membranes are future parts of Ti-based MEMS pressure sensors for active biomedical implants. As pressure is known to be linked to patient’s health for numerous diseases (glaucoma, heart failure, hydrocephalus...), in vivo pressure monitoring appears as a promising way to help medical doctors to define their treatments. Yet, most of current methods used to monitor pressure are still routinely invasive, which increases the risk of infection. The use of Ti as a mechanical transducer appears as a promising approach to tackle the lack of biocompatibility of standard semiconductor materials such as silicon, which requires a complex, bulky and costly packaging.