부산대학교 도서관

This paper provides insight into the transport mechanisms of the collector current in SiGe HBTs operating at cryogenic temperatures and compares three technology generations of devices. Based on the experimental data, a method to differentiate direct tunneling from quasi-ballistic transport is proposed. Measurements indicate that direct tunneling becomes more significant at cryogenic temperatures. The effects of technology scaling on the direct tunneling were investigated using TCAD. Direct tunneling was found to be sensitive to the base width and the Ge profile. It is predicted that without an increase in the Ge content, direct tunneling may dominate over quasi-ballistic transport at the limits of technology scaling.