학술논문

ZnO for thin film BAW devices

Document Type

Conference

Author

Molarius, J.; Nurmela, A.; Pensala, T.; Ylilammi, M.; Dommann, A.

Source

IEEE Ultrasonics Symposium, 2005. Ultrasonics Symposium, 2005 IEEE. 3:1816-1819 2005

Subject

Signal Processing and Analysis
Fields, Waves and Electromagnetics
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Zinc oxide
Thin film devices
Bulk acoustic wave devices
Piezoelectric films
Resonator filters
Acoustic waves
Film bulk acoustic resonators
Silicon compounds
Atomic force microscopy
Acoustic devices

Language

ISSN

1051-0117

Online Access

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