학술논문
Deep Subwavelength Slotted Photonic Crystals Fabricated in a Monolithic Silicon Photonics Technology
Document Type
Conference
Author
Source
2023 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2023 Conference on. :1-2 May, 2023
Subject
Language
Abstract
We report deep subwavelength-engineered slotted photonic crystal nanobeams with minimum features < 70 nm fabricated using a 90 nm monolithic silicon photonics technology at GlobalFoundries. This work enables potential for scalable, advanced integrated photonics applications.