학술논문

Hybrid 14nm FinFET - Silicon Photonics Technology for Low-Power Tb/s/mm2 Optical I/O
Document Type
Conference
Source
2018 IEEE Symposium on VLSI Technology VLSI Technology, 2018 IEEE Symposium on. :221-222 Jun, 2018
Subject
Components, Circuits, Devices and Systems
Modulation
FinFETs
Optical transmitters
Silicon
Optical fibers
Optical signal processing
optical interconnect
silicon photonics
FinFET
Language
ISSN
2158-9682
Abstract
We demonstrate a microbump flip-chip integrated 14nm-FinFET CMOS-Silicon Photonics (SiPh) technology platform enabling ultra-low power Optical I/O transceivers with 1.6Tb/s/mm 2 bandwidth density. The transmitter combines a differential FinFET driver with a Si ring modulator, enabling 40Gb/s NRZ optical modulation at 154fJ/bit dynamic power consumption in a 0.015mm 2 footprint. The receiver combines a FinFET trans-impedance amplifier (TIA) with a Ge photodiode, enabling 40Gb/s NRZ photodetection with −10.3dBm sensitivity at 75fJ/bit power consumption, in a 0.01mm 2 footprint. High-quality data transmission and reception is demonstrated in a loop-back experiment at 1330nm wavelength over standard single mode fiber (SMF) with 2dB link margin. Finally, a 4×40Gb/s, 0.1mm 2 wavelength-division multiplexing (WDM) transmitter with integrated thermal control is demonstrated, enabling Optical I/O scaling substantially beyond 100Gb/s per fiber.