학술논문
MEMS for a watches
Document Type
Conference
Author
Source
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest Micro electro mechanical systems Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS). :1-4 2004
Subject
Language
Abstract
In order to make new mechanical watch movements possible as well as adding new functions to wristwatches, MEMS, UV-LIGA, and silicon micromachining have become indispensable technologies in the watch industries. Examples presented here are deep reactive ion etching (DRIE) of silicon gears, SU-8 based UV-LIGA and MEMS based pressure and magnetic sensors. This article provides a brief overview of some recent commercialized technologies in Switzerland.