학술논문
A new design of rotational tuneable wideband RF MEMS capacitor
Document Type
Conference
Author
Source
2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP) Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on. :33-38 May, 2010
Subject
Language
Abstract
Wide range tuneable components are a key point for High Frequency performances. We have developed a novel RF MEMS Capacitor based on surface variation and high displacement. This paper will present multiple Designs with physical parameter variations for comparative test with Fabricated Device Measurements. The goal of this work is to define a good approximation of the measures to further design devices with Target performances. The main parameters will be the tuneability, Capacitance value, the resonance frequency and finally the maximal actuation voltage allowed.