학술논문
Backside emitting silicon photonic beam steering module for LIDAR application
Document Type
Conference
Author
Source
2021 IEEE 17th International Conference on Group IV Photonics (GFP) Group IV Photonics (GFP), 2021 IEEE 17th International Conference on. :1-2 Dec, 2021
Subject
Language
ISSN
1949-209X
Abstract
We present a silicon photonic beam steering device based upon an 8 x 8 grating coupler focal plane array fed by a MZI switching tree. Transmission of the light from the grating couplers is made through the back side of the chip using topside mirrors.