학술논문

Extraction of Isothermal Condition and Thermal Network in UTBB SOI MOSFETs
Document Type
Periodical
Source
IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 33(9):1306-1308 Sep, 2012
Subject
Engineered Materials, Dielectrics and Plasmas
Components, Circuits, Devices and Systems
Isothermal processes
MOSFETs
Temperature measurement
Radio frequency
Frequency measurement
Logic gates
ETSOI
isothermal condition
MOSFET
RF measurement
self-heating
%24S%24<%2Ftex><%2Fformula>+-parameters%22">$S$ -parameters
thermal network
ultrathin body (UTB) and buried oxide (BOX) (UTBB) silicon-on-insulator (SOI)
UTBSOI
Language
ISSN
0741-3106
1558-0563
Abstract
In this letter, we present a thermal network extraction methodology to characterize self-heating effect using two-port RF measurements. We show the technique of determining isothermal condition using only the self-heating (thermal) dominated range of the spectrum. We use a self-consistent self-heating extraction scheme using both the real and imaginary parts of drain port admittance parameters. Appropriate thermal network is investigated, and a large amount of temperature rise due to self-heating is confirmed for short channel silicon-on-insulator MOSFETs with ultrathin body and buried oxide.