학술논문
Simulation and design of a resonant polysilicon microbridge
Document Type
Conference
Author
Source
2001 International Semiconductor Conference. CAS 2001 Proceedings (Cat. No.01TH8547) Semiconductor conference Semiconductor Conference, 2001. CAS 2001 Proceedings. International. 2:573-576 vol.2 2001
Subject
Language
Abstract
Chemical or mechanical microsensors based on resonant microstructures can be produced in microsystems silicon technology. Detection is related to a shift of the resonant frequency of a microbridge by means of a laser beam. The use of conductive polysilicon is appropriate for fabrication of the structure. This paper develops a reliable electromechanical model for design of the device and its technological process. By MemCAD and MathCAD software the dynamic behaviour is numerically simulated. Random deviations for physical and technological parameters were also simulated by the Monte Carlo method.