학술논문
Importance of modal analysis in vibratory microgyroscopes
Document Type
Conference
Author
Source
2020 XXXIIIrd General Assembly and Scientific Symposium of the International Union of Radio Science General Assembly and Scientific Symposium of the International Union of Radio Science (URSI GASS), 2020 XXXIIIrd. :1-4 Aug, 2020
Subject
Language
ISSN
2642-4339
Abstract
In this paper some considerations regarding vibratory MEMS gyroscopes principle of operation and physical quantities which are related to vibrations are considered. Because this type of device uses energy comes from vibrations and transfers this energy with rotation presence to sensor, it is interesting how it behaves for different dimension parameters including geometrical dimensions. This work presents results of analysis eigenfrequency for all motion direction under different dimensions values.