학술논문

High Precision Sensor Probe for Beam-Tilt Alignment Based on a Quadrant Photodetector
Document Type
Conference
Source
2023 16th International Conference on Sensing Technology (ICST) Sensing Technology (ICST), 2023 16th International Conference on. :1-5 Dec, 2023
Subject
Aerospace
Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Engineering Profession
Fields, Waves and Electromagnetics
General Topics for Engineers
Geoscience
Nuclear Engineering
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Transportation
Integrated optics
Optical interferometry
Uncertainty
Measurement by laser beam
Length measurement
Photodetectors
Optical sensors
Sensors
Interferometry
Optical signal detection
Capacitors
Metrology
Language
Abstract
This paper describes the development of a laser beam positioning sensor based on a quadrant photodetector. The sensor was a critical component of a wider alignment system. It was developed to meet the stringent 45 μrad precision requirement for the orientation of the optical interferometry cavity for the length measurement in the new calculable cross-capacitor at the National Measurement Institute, Australia. This system has been used to align the optical cavity to the capacitor’s axis to within 110 μrad, which is corrected for, with an uncertainty of 6 μrad, well within the required precision.