부산대학교 도서관

We investigate the confinement of surface acoustic waves (SAWs)in two-dimensional (2D)cavities on GaAs defined by focusing interdigital transducers (IDTs). These IDTs have curved-shape fingers with shapes designed to improve beam focusing by taking into account the anisotropy of the elastic and piezoelectric properties of the GaAs surface. We calculate the field distribution within the cavities using a finite element model, which also determines the electrical response of the structures. The calculated profiles are compared with the field distribution measured using scanning interferometry. The results demonstrate the feasibility of generation of μm-sized SAW fields for the modulation of semiconductor nanostructures.