학술논문
Emerging role of semiconductor process equipment to overcome device failure mechanisms
Document Type
Conference
Author
Source
1997 IEEE International Reliability Physics Symposium Proceedings. 35th Annual Reliability physics Reliability Physics Symposium, 1997. 35th Annual Proceedings., IEEE International. :1-6 1997
Subject
Language
Abstract
With the recent dramatic drop in DRAM prices, along with a relentless increase in microprocessor speed, has come an ambitious, do-or-die industry wide transition to 0.25 /spl mu/m technology and soon, 300 mm wafer size. This paper highlights the role of newly developed process equipment capabilities to overcome certain failure mechanisms in 0.25 /spl mu/m enabling device structures such as Shallow Trench Isolation (STI), low RC polysilicide gates, low thermal budget pre-metal dielectrics, high /spl kappa/ storage capacitors, low resistance contact plugs, low capacitance intermetal dielectrics and fine line interconnects.