부산대학교 도서관

Summary form only given. We have used the PSPICE(R) software to provide a comprehensive simulation of the electrical characteristics of a One Atmosphere Uniform Glow Discharge Plasma (OAUGDP) reactor system. The key part of the task is to develop a valid PSPICE(R) model for the plasma discharge in the OAUGDP reactor, which consists of two parallel metal electrode plates with a small gap between them. At least one electrode is covered with a dielectric plate, which can be modeled as a capacitor, as does the small gap. The plasma discharge itself is modeled as a voltage-controlled current source which is switched on as long as the voltage across the gap exceeds the breakdown voltage. The current source and its output voltage and current follow a power law, which is characteristic of the voltage-current behavior of a normal glow discharge. Simulation results agree well with the experimental data, as illustrated below, and confirm the importance of the impedance matching circuit in achieving a high power factor and a stable normal glow discharge in the OAUGDP reactor.