학술논문
Design and Fabrication of Hybrid Lithium Niobate Electro-Optic Modulators
Document Type
Conference
Source
2022 IEEE International Conference on Emerging Electronics (ICEE) Emerging Electronics (ICEE), 2022 IEEE International Conference on. :1-4 Dec, 2022
Subject
Language
Abstract
A process for designing and fabricating hybrid lithium niobate Mach-Zehnder electro-optic modulators is described. The design uses unetched thin-film lithium niobate bonded to a foundry-fabricated chip containing planarized silicon nitride waveguides. We demonstrate 3-dB electro-optic bandwidth greater than 110 GHz and $\mathrm{V}\pi \mathrm{L}$ of 2.4 V.cm, at 1310 nm wavelength.