학술논문
Deposition of high quality epitaxial YBCO film on thin crystalline substrate for bolometer fabrication
Document Type
Conference
Author
Source
2015 23rd Iranian Conference on Electrical Engineering Electrical Engineering (ICEE), 2015 23rd Iranian Conference on. :1389-1392 May, 2015
Subject
Language
ISSN
2164-7054
Abstract
We present the results of the deposition of high quality YBCO superconducting film on 50μτη thin crystalline substrate for the fabrication of bolometric transition-edge sensors. C-axis epitaxial layers of high-temperature superconducting YBCO film were prepared by RF magnetron sputtering method on SrTiO 3 substrates. The thin film crystal growth morphology is studied by SEM images, and the superconducting properties were determined by R vs. T measurements. The temperature gradient of the film resistances are measured and compared to that of the previously deposited YBCO crystalline thin films using PLD method. The films were patterned into meander lines for the four-probe characterization and also fabrication of transition-edge bolometer.