학술논문
Phase-Locked and Phase-Tuned Resonant-MOEMS External Cavity QCLs and their Application for Fast and Broadband Mid-Infrared Reflectometry
Document Type
Conference
Source
2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC), 2023 Conference on. :1-1 Jun, 2023
Subject
Language
ISSN
2833-1052
Abstract
The combination of broadband quantum cascade lasers (QCLs) with micro-electro-mechanical system (MOEMS) scanners having an integrated diffraction grating as emission-wavelength-selective element enables the realization of very compact, rapidly tuneable, and robust light sources for mid-infrared spectroscopy. In contrast to a motor-driven mechanical grating tuning mechanism, MOEMS scanners do not limit the lifetime of the laser module, as they are made from single-crystalline silicon and undergo no mechanical wear 1 .